This is not a complete answer but perhaps contributes another approach to help you discover / verify your formula for $\det M_n$.
Let us denote the value $p(a,n)$ to be the determinant of a similar looking $n\times n$ matrix starting with $1/a!$ instead on the top-left corner:
$$
p(a,n) = \det \begin{bmatrix} \frac{1}{a!} & \frac{1}{(a+1)!} & \cdots & \frac{1}{(a+n-1)!} \\ \frac{1}{(a+1)!} & \frac{1}{(a+2)!} & \cdots \\ \vdots & & \ddots \\ \frac{1}{(a+n-1)!} & \frac{1}{(a+n)!} & \cdots & \frac{1}{(a+2n-2)!}\end{bmatrix}
$$
Then we have the recursive relation:
$$
p(a,n) p(a+2,n-2) = p(a+2,n-1)p(a,n-1) - p(a+1,n-1)^{2}
$$
This comes from using the condensation relation for computing determinants:
Theorem. (Desnanot-Jacobi / Sylvester / Dodgson condensation)
Let $M$ be an $n\times n$ square matrix, and denote $M_{i}^{i'}$ to be the submatrix obtained from $M$ by removing the $i$-th row and $i'$-th column, and denote $M_{i,j}^{i',j'}$ to be the submatrix obtained from $M$ by removing the $i$-th and $j$-th row, and removing the $i'$-th and $j'$-th column. Then
$$
\det M \det M_{1,n}^{1,n} = \det M_{1}^{1}\det M_{n}^{n}-det M_{1}^{n}\det M_{n}^{1}
$$
(See: https://en.wikipedia.org/wiki/Dodgson_condensation, https://en.wikipedia.org/wiki/Sylvester%27s_determinant_identity)
Remark. This is often useful for finding $\det M$ when the entries of $M$ has a nice structure like in this case. I sometimes refer to this whimsically as "Alice in wonderland identity", as Charles Dodgson is more known as Lewis Carroll.
With a few initial conditions
$$
\begin{align*}
p(a,1) &= \det\left[ \frac{1}{a!}\right]= \frac{1}{a!}\\
p(a,2) &= \det\begin{bmatrix} \frac{1}{a!} & \frac{1}{(a+1)!}\\
\frac{1}{(a+1)!} & \frac{1}{(a+2)!}\end{bmatrix} = \frac{-1}{(a+1)!(a+2)!}
\end{align*}
$$
one could then compute a few more terms of $p(a,n)$ to guess a relation. By playing around a bit it does seem like we have $p(a,n) =\pm \frac{c(a,n)}{(a+n-1)!\cdots(a+2n-2)!}$ for some coefficient $c(a,n)$, though I did not work it out carefully. And finally to obtain your formula, we specialize $a=1$ to have $\det M_n = p(1,n)$.
Added edit.
By following this recursion, I got
$$
p(a,n) = \frac{c_n}{(a+n-1)!\cdots(a+2n-2)!},
$$
where $c_n = - \frac{c_{n-1}^2}{c_{n-2}}(n-1)$ with $c_1 = 1, c_2 = -1$.
This gives $c_n = (-1)^{\lfloor n/2\rfloor}(n-1)!\cdots 0!$ which gives
$$
p(a,n) = (-1)^{\lfloor n/2\rfloor}\frac{(n-1)!\cdots 0!}{(a+n-1)!\cdots(a+2n-2)!},
$$
which agrees with Misha's answer above.